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Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry
standard by ASTM International, 01/01/2000

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Description

Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry

Product Details

Published:
01/01/2000
Number of Pages:
9
File Size:
1 file , 280 KB