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ASTM E1438-11(2019)

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ASTM E1438-11(2019)

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Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
standard by ASTM International, 11/01/2019

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Description

1.1 This guide provides the SIMS analyst with a method for determining the width of interfaces from SIMS sputtering data obtained from analyses of layered specimens (both organic and inorganic). This guide does not apply to data obtained from analyses of specimens with thin markers or specimens without interfaces such as ion-implanted specimens.

Product Details

Published:
11/01/2019
Number of Pages:
3
File Size:
1 file , 82 KB